JPH03110851U - - Google Patents
Info
- Publication number
- JPH03110851U JPH03110851U JP1975690U JP1975690U JPH03110851U JP H03110851 U JPH03110851 U JP H03110851U JP 1975690 U JP1975690 U JP 1975690U JP 1975690 U JP1975690 U JP 1975690U JP H03110851 U JPH03110851 U JP H03110851U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- suction
- nozzle hole
- vacuum
- suction nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1975690U JPH03110851U (en]) | 1990-02-27 | 1990-02-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1975690U JPH03110851U (en]) | 1990-02-27 | 1990-02-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03110851U true JPH03110851U (en]) | 1991-11-13 |
Family
ID=31522860
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1975690U Pending JPH03110851U (en]) | 1990-02-27 | 1990-02-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03110851U (en]) |
-
1990
- 1990-02-27 JP JP1975690U patent/JPH03110851U/ja active Pending